Yield prediction feedback for controlling an equipment engineering system

ABSTRACT

A yield prediction is received by a scheduling and dispatch controller, wherein the yield prediction is associated with a manufacturing tool and a product. A weighting of the manufacturing tool is adjusted in a routing algorithm based on the yield prediction. A cost-benefit analysis is computed that identifies a cost and a benefit of manufacturing future products on the manufacturing tool. A determination is made regarding whether to process a future product on the manufacturing tool based on the cost-benefit analysis.

RELATED APPLICATIONS

This patent application claims the benefit under 35 U.S.C. §119(e) ofU.S. provisional application No. 61/068,652, filed Mar. 6, 2008, and ofU.S. provisional application No. 61/055,954, filed May 23, 2008, whichare herein incorporated by reference.

TECHNICAL FIELD

Embodiments of the present invention relate yield prediction, and morespecifically to performing automated actions in response to a yieldprediction.

BACKGROUND

Equipment Engineering Systems (EES) manage the processing of product bymanufacturing machines. Yield Management Systems (YMS) utilizeparametric and e-test data to analyze yield excursions. Someconventional YMSs leverage data from a fault detection andclassification (FDC) system of conventional equipment engineeringsystems (EES) to provide yield engineers additional data when analyzingyield. In a limited number of conventional YMSs, the data from the FDCsystem is used to predict yield. This yield prediction may enable yieldengineers to detect potential yield problems before a product has beencompleted. However, in conventional manufacturing environments there isno mechanism for providing the predicted yield information to subsystemsof the EES. Nor are subsystems of the conventional EES equipped toperform automated actions in response to yield predictions.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention is illustrated by way of example, and not by wayof limitation, in the figures of the accompanying drawings and in which:

FIG. 1 illustrates an exemplary architecture of a manufacturingenvironment, in which embodiments of the present invention may operate;

FIG. 2 illustrates an exemplary architecture of another manufacturingenvironment, in which embodiments of the present invention may operate;

FIG. 3 illustrates an example of how partial least squares (PLS) can beused by a yield predictor, in accordance with one embodiment of thepresent invention;

FIG. 4A illustrates a graphically configurable event-condition-action(ECA) strategy engine, in accordance with one embodiment of the presentinvention;

FIG. 4B illustrates example data for an etch pressure check that is usedby the graphically configurable ECA strategy engine of FIG. 4A, inaccordance with one embodiment of the present invention;

FIG. 5A illustrates a yield distribution plot showing yield versesetchback time, in accordance with one embodiment of the presentinvention;

FIGS. 5B-5E illustrate example yield results, in accordance withembodiments of the present invention;

FIG. 5F illustrates one embodiment of a hierarchical arrangement of R2Rcontrol modules;

FIG. 5G illustrates a plot that shows factory profit as a function ofthe yield factor weight, in accordance with one embodiment of thepresent invention;

FIG. 6 illustrates a moving window technique is used to update a yieldprediction model, in accordance with one embodiment of the presentinvention;

FIG. 7A illustrates a process flow diagram for manufacturing asemiconductor product, in accordance with one embodiment of the presentinvention;

FIG. 7B illustrates a process flow diagram for manufacturing asemiconductor product, in accordance with another embodiment of thepresent invention;

FIG. 8 illustrates a flow diagram of one embodiment for a method ofperforming automated actions by subsystems of an EES in response toyield predictions;

FIG. 9 illustrates a flow diagram of one embodiment for a method oftuning a run to run (R2R) controller in response to a yield prediction;

FIG. 10 illustrates a flow diagram of one embodiment for a method ofrouting product through manufacturing machines by a S/D controller;

FIG. 11 illustrates a flow diagram of one embodiment for a method ofscheduling maintenance for a manufacturing machine in response to apredicted yield excursion;

FIG. 12 illustrates a flow diagram of one embodiment for a method oftracking equipment performance;

FIG. 13A illustrates a flow diagram of one embodiment for a method ofautomatically performing actions by a strategy engine in response toyield predictions;

FIG. 13B illustrates a flow diagram of another embodiment for a methodof automatically performing actions by a strategy engine in response toyield predictions; and

FIG. 14 illustrates a block diagram of an exemplary computer system, inaccordance with one embodiment of the present invention.

DETAILED DESCRIPTION

Described herein is a method and apparatus for performing automatedactions in response to yield predictions. An end-of-line yieldprediction is generated based on data associated with a manufacturingprocess, a manufacturing tool and/or a manufactured product. Theend-of-line yield prediction is sent to a one or more components of anequipment engineering system. In one embodiment, the yield prediction isreceived by a scheduling and dispatch controller. A weighting of themanufacturing tool is adjusted in a routing algorithm based on the yieldprediction. A cost-benefit analysis is computed that identifies a costand a benefit of manufacturing future products on the manufacturingtool. A determination is made regarding whether to process a futureproduct on the manufacturing tool based on the cost-benefit analysis.

In the following description, numerous details are set forth. It will beapparent, however, to one skilled in the art, that the present inventionmay be practiced without these specific details. In some instances,well-known structures and devices are shown in block diagram form,rather than in detail, in order to avoid obscuring the presentinvention.

Some portions of the detailed descriptions which follow are presented interms of algorithms and symbolic representations of operations on databits within a computer memory. Unless specifically stated otherwise, asapparent from the following discussion, it is appreciated thatthroughout the description, discussions utilizing terms such as“collecting”, “predicting”, “performing”, “adjusting”, “comparing”, orthe like, refer to the action and processes of a computer system, orsimilar electronic computing device, that manipulates and transformsdata represented as physical (electronic) quantities within the computersystem's registers and memories into other data similarly represented asphysical quantities within the computer system memories or registers orother such information storage, transmission or display devices.

The present invention also relates to an apparatus for performing theoperations herein. This apparatus may be specially constructed for therequired purposes, or it may comprise a general purpose computerselectively activated or reconfigured by a computer program stored inthe computer. Such a computer program may be stored in a computerreadable storage medium, such as, but not limited to, any type of diskincluding floppy disks, optical disks, CD-ROMs, and magnetic-opticaldisks, read-only memories (ROMs), random access memories (RAMs), EPROMs,EEPROMs, magnetic or optical cards, or any type of media suitable forstoring electronic instructions, each coupled to a computer system bus.

The algorithms and displays presented herein are not inherently relatedto any particular computer or other apparatus. Various general purposesystems may be used with programs in accordance with the teachingsherein, or it may prove convenient to construct more specializedapparatus to perform the required method steps. The required structurefor a variety of these systems will appear as set forth in thedescription below. In addition, the present invention is not describedwith reference to any particular programming language. It will beappreciated that a variety of programming languages may be used toimplement the teachings of the invention as described herein.

The present invention may be provided as a computer program product, orsoftware, that may include a machine-readable medium having storedthereon instructions, which may be used to program a computer system (orother electronic devices) to perform a process according to the presentinvention. A machine-readable medium includes any mechanism for storingor transmitting information in a form readable by a machine (e.g., acomputer). For example, a machine-readable (e.g., computer-readable)medium includes a machine (e.g., a computer) readable storage medium(e.g., read only memory (“ROM”), random access memory (“RAM”), magneticdisk storage media, optical storage media, flash memory devices, etc.),a machine (e.g., computer) readable transmission medium (electrical,optical, acoustical or other form of propagated signals (e.g., carrierwaves, infrared signals, digital signals, etc.)), etc.

FIG. 1 illustrates an exemplary architecture of a manufacturingenvironment 100, in which embodiments of the present invention mayoperate. The manufacturing environment 100 may be a semiconductormanufacturing environment, an automotive manufacturing environment, etc.In one embodiment, the manufacturing environment 100 includes anequipment engineering system (EES) 105, a manufacturing execution system(MES) 110, a yield management system (YMS) 120 and a consolidated datastore 115. The EES 105, MES 110, YMS 120 and consolidated data store 115may be connected via a network (not shown), such as a public network(e.g., Internet), a private network (e.g., Ethernet or a local areaNetwork (LAN)), or a combination thereof.

The manufacturing execution system (MES) 110 is a system that can beused to measure and control production activities in a manufacturingenvironment. The MES 110 may control some production activities (e.g.,critical production activities) or all production activities of a set ofmanufacturing equipment (e.g., all photolithography equipment in asemiconductor fabrication facility), of a manufacturing facility (e.g.,an automobile production plant), of an entire company, etc. The MES 110may include manual and computerized off-line and/or on-line transactionprocessing systems. Such systems may include manufacturing machines,metrology devices, client computing devices, server computing devices,databases, etc. that may perform functions related to processing.

In one embodiment, the MES 110 is connected with a consolidated datastore 115. The consolidated data store 115 may include databases, filesystems, or other arrangements of data on nonvolatile memory (e.g., harddisk drives, tape drives, optical drives, etc.), volatile memory (e.g.,random access memory (RAM)), or combination thereof. In one embodiment,the consolidated data store 115 includes data from multiple data stores(e.g., a YMS data store, a maintenance data store, a metrology datastore, process data stores, etc.) that are interconnected. Theconsolidated data store 115 may store, for example, historical processinformation of manufacturing recipes (e.g., temperatures, pressures,chemicals used, process times, etc.), equipment maintenance histories,inventories, etc. The consolidated data store 115 may also store datagenerated by the MES 110, YMS 120 and/or EES 105. For example, the EES105 may store fault detection and characterization data in theconsolidated data store 115, the YMS 120 may store yield analysis datain the consolidated data store 115, and the MES 110 may store historicalprocess information in the consolidated data store 115. This permitseach of the YMS 120, EES 105 and MES 110 to leverage data generated bythe other systems.

The EES 105 is a system that manages some or all operations of afactory. The EES 105 may include manual and computerized off-line and/oron-line transaction processing systems that may include client computingdevices, server computing devices, databases, etc. that may perform thefunctions of equipment tracking, dispatching (e.g., determining whatmaterial goes to what processes), product genealogy, labor tracking(e.g., personnel scheduling), inventory management, costing, electronicsignature capture, defect and resolution monitoring, key performanceindicator monitoring and alarming, maintenance scheduling, and so on.

The EES 105 draws inferences from, reports out, and/or acts upon thecombined information that is collected and stored in the consolidateddata store 115 and/or the metrology data and process data that isreported by the MES 110. For example, EES 105 can act as an earlywarning system (e.g., predict scrap, initiate product rework, etc.),provide bottleneck analysis, provide asset management (e.g., reduceunscheduled equipment downtime), improve lean practices, etc. The EES105 can be used to gain an understanding of the manufacturingenvironment 100, and can enable a user to determine an efficiency of themanufacturing environment 100 and/or how to improve all or components ofthe manufacturing environment 100. In one embodiment, the EES 105includes components that enable the EES 105 to detect faults, classifyfaults, and predict yield. Such capabilities are explained in greaterdetail below with reference to FIG. 2.

The yield management system (YMS) 120 analyzes end-of-line data such ase-test data to determine product yield. The end-of-line data may includewafer acceptance testing (WAT), wafer sort results and/or final testoperations. The yield manager 120 can provide product yield trends, lotlevel analysis of product yield, yield correlation to manufacturingprocesses, statistical analysis of yield, etc. In one embodiment, theYMS 120 uses integrated circuit design, visible defect, parametric ande-test data to identify causes of low yield. The YMS 120 can improveyield by monitoring yield, associating yield loss to defects andparametric data, and associating defects and parametric data toprocesses and tools. If product yield is too low, yield managementsystem 120 may report the low yield to EES 105. Such a report mayinclude an indication of key contributors to the low yield. EES 105 maythen take actions to increase yield. The YMS 120 stores yield data inthe consolidated data store 115, and may access data stored by the MES110 and EES 105 to better troubleshoot any yield problems.

FIG. 2 illustrates an exemplary architecture of a manufacturingenvironment 222, in which embodiments of the present invention mayoperate. In one embodiment, the manufacturing environment 222 includes aMES 210, a YMS 220, an EES 205 and a consolidated data store 215. In afurther embodiment, the manufacturing environment 222 corresponds tomanufacturing environment 200 of FIG. 1.

In the MES 210 of FIG. 2, manufacturing machines 280 and metrology tools285 are illustrated. Examples of manufacturing machines in asemiconductor manufacturing environment include implanters, thermalreactors, etchers, lithography machines, and other machines forprocessing semiconductor product. Examples of metrology tools includeellipsometers, interferometers, scanning electron microscopes (SEMs),etc. Though the MES 210 is shown to include only manufacturing machines280 and metrology tools 285, it may also include client computingdevices, server computing devices, databases, etc., which are not shownfor clarity. The metrology tools 285, manufacturing machines 280 andadditional devices of the MES 210 are linked to an equipment automationlayer 224 via one or more interfaces. Examples of interfaces include asemiconductor equipment communications standards (SECS) interface, ageneric model for communications and control of manufacturing equipment(GEM) interface, a SECS/GEM interface 290, an EDA (“Interface A”)interface 295, a high speed SECS message services (HSMS) interface, etc.

The equipment automation layer 224 interconnects the manufacturingmachines 280, metrology tools 285 and other devices, and links them tothe consolidated data store 215, the EES 205 and/or the YMS 220. In oneembodiment, the equipment automation layer 224 enables process data(e.g., data collected by a manufacturing machine 280 during a processrun) and metrology data (e.g., data collected by a metrology tool 285after a process run) to be stored in the consolidated data store 215 andto be reported to a fault detection and classification (FDC) component226 of the EES 205. Such data may be reported to the FDC component 226in real time as the data is collected.

In one embodiment, EES 205 includes a fault detection and classificationcomponent (FDC) 226, a yield predictor 228 and a factory wide controller230. The EES 205 may also include a user interface 298 that can combinedisparate information from multiple different sources (e.g., the YMS220, the MES 210, the EES 230, etc.), and present this information in aunified manner.

FDC component 226 can receive data in real time from the equipmentautomation layer 224 as the data is collected and/or from theconsolidated data store 215. The data may include process data that hasbeen gathered by the manufacturing machines during a process run and/ormetrology data that was gathered after a process run. Each manufacturingprocess that is performed on a manufacturing machine 280 ischaracterized by various physical conditions and properties measured bysensors of the manufacturing machine 280, and by various operatingparameters, collectively referred to as process data. Each distinctphysical condition or property measured by sensors, and each operatingparameter, may be a distinct process variable of the process data.Examples of process variables representing sensor data include chamberpressure, susceptor temperature, RF forward power, and RF reflectedpower. Examples of process variables representing operating parametersinclude flow rate settings (e.g., of chemical reagents), and throttlevalve settings (e.g., for a chamber exhaust vacuum pump). After aproduct is processed in a manufacturing machine 280, the product may beanalyzed by a metrology device 285 to measure one or more properties ofthe product. Measurements produced by such analysis are referred toherein as metrology data. Examples of metrology data include thicknessmeasurements (e.g., a measured by an ellipsometer), particle countmeasurements (e.g., as measured by a scanning electron microscope(SEM)), wafer curvature measurements (e.g., as measured by aninterferometer), etc.

The FDC component 226 may use statistical process monitoring (a means ofperforming statistical analysis on process data and metrology data),genetic algorithms, neural networks, etc. to detect and/or diagnosefaults. A fault can be a malfunction or maladjustment of manufacturingmachines 280 (e.g., deviation of a machine's operating parameters fromintended values), or an indication of a need for preventive maintenanceto prevent an imminent malfunction or maladjustment. A fault is detectedwhen one or more of the statistics of recent process data and/ormetrology data deviate from a statistical model by an amount greatenough to cause a model metric to exceed a respective confidencethreshold. A model metric is a scalar number whose value represents amagnitude of deviation between the statistical characteristics ofprocess/metrology data and the statistical characteristics predicted bythe model.

Once a fault has been detected, the FDC component 226 compares the faultto a collection of fault signatures. Each fault signature representsprocess conditions representative of a specific fault or faults. Whenthere is a high degree of similarity between one of the fault signaturesand the current fault, a match is reported, and the fault is classified.Alternatively, the FDC component 226 may use statistical summarytechniques that are then matched to the values for previous occurrencesof faults to find a fault that is the closest.

In one embodiment, the FDC component 226 includes a virtual metrologymodule (not shown) that uses virtual metrology to predict metrology databased on other metrology data and/or process data. The virtual metrologymodule utilizes both fault detection/classification data (includinginformation pertaining to a detected fault such as contributions to thefault, an identification/classification of the fault, etc.) and upstreammetrology data as input, and produces predictions of metrology datavalues as output. The virtual metrology prediction models may be updatedwhen actual metrology data is available.

The FDC component 226 sends fault detection and classification data tothe yield predictor 228. The FDC component 226 may also send virtualmetrology data, process data and/or real metrology data to the yieldpredictor 228. In one embodiment, the FDC component 226 applies datareduction techniques to reduce the amount of data that is sent to yieldpredictor 228. Alternatively, such data reduction may be performed bythe yield predictor 228. Data reduction may be performed byconsolidating data (e.g., metrology data, virtual metrology data,process data, etc.) into indicators of importance. For example,temperature measurement process data may be consolidated into an averagetemperature over an entire process run, or multiple different sensormeasurements may be consolidated to provide a single multivariateindicator of the health of the tool. In one embodiment, FDC component226 determines what consolidated data is relevant to predicting yieldbased on feedback received from the yield predictor 228. Therefore, theFDC component 226 may limit the information sent to yield predictor 228to include only the consolidated data relevant to yield prediction.

The yield predictor 228 analyzes the received data to make a yieldprediction for a product. Yield predictor 228 relates process data andmetrology data to one or more yield prediction models to make yieldpredictions. The metrology data may include downstream metrology data(collected before a process run), upstream metrology data (collectedafter a process run) and/or virtual metrology data. The process data maybe collected and processed by the FDC component 226 in real time as aprocess is performed or from the consolidated database after the processhas been completed.

The yield prediction models may predict yield using principal componentanalysis (PCA), multiple linear regression (MLR), neural networks (NR),Bayesian analysis, partial least squares (PLS), etc. Baseline yieldprediction models may be received from the YMS 220. As product yielddata becomes available, the YMS 220 may modify the yield predictionmodels, and send updated yield prediction models to the yield predictor228. Thus, the yield prediction models used by the yield predictor 228can be dynamic yield prediction models.

In one embodiment, the yield predictor makes yield predictions usingPLS. An example of how PLS works is shown in FIG. 3. Referring to FIG.3, in a system with ‘p’ inputs (process data, metrology data and/orvirtual metrology data of interest in prediction) and ‘q’ outputs (yieldindicators of interest), a relatively small set of ‘a’ components areutilized to relate variation in the inputs to variation in the outputs.These components can be thought of roughly as the dimensions ofvariability in the input space that have the most significant impact ondimensions of variability in the output space.

Referring to FIG. 2, in one embodiment, the yield prediction modelsinclude multiple yield excursion events and/or yield excursionconditions. A yield excursion event is triggered when process dataand/or metrology data indicate a particular yield excursion. Forexample, if a certain set of conditions are shown by the process dataand/or metrology data, a yield excursion event due to Ti/N liftoff maybe triggered. Each yield excursion event may be associated with one ormore yield excursion conditions. Yield excursion conditions may betriggered if an associated yield excursion event is triggered and if oneor more additional conditions are met. Alternatively, some yieldexcursion conditions may be triggered automatically if a yield excursionevent is triggered.

The yield predictor 228 predicts yield with varying degrees of accuracy.The confidence (predicted accuracy) of the yield prediction can dependon numerous variables, such as how close a product is to completion whenthe yield prediction is made, the quality of the data used to make theprediction, whether the prediction is being made for a relatively newproduct or for a product that has been successfully manufacturednumerous times in the past, and so on. In one embodiment, the yieldpredictor 228 determines a prediction quality for each yield prediction.The yield prediction quality can later be used in conjunction with theyield prediction to determine what, if any, automated actions to performby EES subsystems.

In one embodiment, wafer test patterns are used to highlight certainproduction features for selected products. The wafer test patternsprovide additional data that may be used to more accurately predictyield. The wafer test patterns may be manufactured along with product inthe same process run. If testing of the wafer test patterns indicatesabnormalities, it can be assumed that the abnormalities will also affectthe product. Data from the wafer test patterns can be incorporated intothe yield model. For example, abnormalities in the wafer test patternscan be associated with specific yield excursions in a yield predictionmodel. This can enable the yield predictor 228 to make yield predictionswith increased confidence.

In one embodiment, the FDC component 226 and the yield predictor 228 arecombined into a single component. In such an embodiment, the same modelsmay be used for fault detection and classification, virtual metrologyand yield prediction. Alternatively, separate models may be used for oneof more of fault detection and classification, virtual metrology and/oryield prediction. In one embodiment, the FDC component 226 includes oneor more statistical models that have metrics that are tied to yieldexcursions. Thus, the FDC component 226 can provide equipment andprocess health information to the factory-wide controller 230, while atthe same time providing input to the yield predictor 228.

The factory-wide controller 230 receives fault detection and faultclassification data (which may include virtual metrology data) from theFDC component 226 and yield prediction data from the yield predictor228. The factory-wide controller 230 is responsible for initiatingactions that modify components of the manufacturing environment 200based on the received fault detection/classification data and yieldprediction data. Through such actions, the factory-wide controller 230can improve both product productivity and quality in an automatedfashion. In one embodiment, these actions are in the form of intelligentbusiness rules that can be launched either through real-time systemevents, predicted events, or scheduled activities. For example,factory-wide controller 230 may automatically schedule maintenance for amanufacturing machine 280, automatically shut down the manufacturingmachine 280, automatically adjust a process recipe, etc. when certainvalues are detected in the received data. In another example, the yieldprediction can be utilized as feedback information to augment a run torun (R2R) control capability from lot-to-lot control to wafer-to-wafercontrol, to augment a maintenance management system and/or toautomatically reschedule manufacturing machines that will processproduct. The actions may also optimize maintenance schedules, schedulingand dispatch decisions, process control, etc.

Although optimum algorithms in the yield prediction domain can becomequite complex, the yield prediction data can be leveraged intorelatively simplistic algorithms initially and still provide significantbenefit. For example, yield thresholds tied to a specific process couldbe used to generate go/no-go decisions to improve quality andproductivity and minimize scrap. In another example, yield trends couldbe utilized to guide conservative tuning directions to run to run (R2R)process control algorithms, which would result in processing adjustmentsacross the manufacturing environment 222 that are directed towardsfactory-wide productivity (rather than individual process capability)goals.

The factory-wide controller 230 may include a flexible and scalablecapability for integrating multiple different EES subsystems, and amechanism for governing the collaborative utilization of thesesubsystems to achieve factory-wide directives. In one embodiment, thefactory-wide controller 230 enables interaction between the yieldprediction output and EES subsystems such as maintenance management,scheduling and dispatch control and process control via a strategyengine 235. The strategy engine 235 is connected to multiple differentcontrollers, each of which controls a different subsystem of the EES205. For example, a run to run (R2R) controller 260 controls a R2Rsystem, a schedule and dispatch (S/D) controller 265 controls ascheduling and dispatch system, a computerized maintenance managementsystem (CMMS) controller 270 controls a CMMS, an equipment performancetracking (EPT) controller 275 controls an EPT system, etc. In oneembodiment, the strategy engine 235 acts as a supervisory system for thecontrollers.

The capabilities of each EES subsystem can be used cooperatively toachieve an optimal reconfiguration of the factory to support yieldobjectives. In one embodiment, interoperability between the controllers,the yield predictor 228, and/or other components of the manufacturingenvironment 222 is facilitated by adherence to flexible integrationstandards such as the semiconductor equipment and materialsinternational (SEMI) E133 Process Control Systems (PCS) standard and webservices (e.g., including web service calls). As an example ofcooperative use of yield predictions, the strategy engine 235 may pass ayield prediction on to the R2R controller 260, the S/D controller 265and the CMMS controller 270. The R2R controller 260 can used the yieldprediction to determine what tools can be sufficiently modified tosupport a specific process change, and what the process change will meanin terms of cycle times, resource requirements, etc. This informationcan then be weighed by the strategy engine 235 against incoming orderquantities and priorities as well as current work in progress (WIP)provided by the S/D controller 165. The CMMS controller 270 can thendetermine predictive maintenance Pareto's and projected timelines.Utilizing information from the R2R controller 260, the CMMS controller270 and the S/D controller 265, the strategy engine 235 can determine anoptimal solution per factory objectives. Such a determination may bemade analytically through a weighted cost function, or heuristicallythrough a set of workflow rules. The strategy engine 235 can then informthe three controllers of the production decision, and these controllersmay adjust lower level control targets, predictive maintenance schedulesand S/D decisions accordingly.

In one embodiment, the strategy engine 235 is an event-condition-action(ECA) strategy engine that provides a highly configurable and scalablemechanism for defining the collaborative utilization of resources in themanufacturing environment 200. An ECA strategy engine utilizes “controlrules” that are triggered in response to events in the factory. Theserules call on available resources in a sequence based on associatedconditions to service events. For example, if a particular yieldexcursion event is detected, an ECA strategy engine may call anotification resource to inform a responsible engineer of the yieldexcursion event, call a maintenance system to request that a faultymanufacturing machine be scheduled for maintenance, call ascheduling/dispatch controller to suggest that WIP and especiallyhot-lots be scheduled around this tool, provide information to a R2Rcontroller so that the “best” yield can be achieved with the tool untilthe tool is brought down for maintenance, etc.

In one embodiment, in which the strategy engine 235 is an ECA strategyengine, received yield prediction data includes a yield excursion eventand one or more yield excursion conditions. The yield excursion eventand yield excursion conditions may be used by the strategy engine 235 totake actions in response to the yield prediction. In a furtherembodiment, one of the yield excursion conditions is a yield predictionquality. Therefore, some actions may only be performed if a yieldprediction of a specified yield prediction quality threshold isreceived.

FIG. 4A illustrates a graphically configurable event-condition-action(ECA) strategy engine 400, in accordance with one embodiment of thepresent invention. The ECA strategy engine 400 includes a graphicaldrag-n-drop tool that allows for the easy development, visualization andreconfiguration of rules. Icons representing EES subsystem capabilitiessuch as fault detection and scheduling maintenance can be dragged ontothe workspace from the pallet at the left. The resulting “rules” definehow the manufacturing environment operates in response to an event.

The interface 400 shows an example set of rules for an etch pressurecheck event whose data is shown in FIG. 4B. The illustrated set of rulesfirst performs a fault check 405. The fault check 405 checks for one ormore conditions by performing a pressure analysis, checking a toolstate, and checking for any critical alarms. If a conditioncorresponding to a critical alarm is identified, the tool is shut down410. Shutting down the tool 410 in the illustrated example includesupdating an equipment performance tracking system, sending MES tool downinformation, and updating a CMMS system. If a condition corresponding toa warning alarm is identified, a PM is set to pending 415, whichincludes scheduling maintenance and managing a state of a manufacturingmachine. Thus, utilization of ECA technology and a graphical ECAstrategy engine enables users to define the interoperability of EESsubsystems in a reconfigurable and non-programmatic way.

Returning to FIG. 2, when predetermined events occur and predeterminedconditions are satisfied, the strategy engine performs one or a set ofactions. These actions may occur simultaneously or in series. Whencertain actions are completed, feedback that results from the actionsmay be sent to the strategy engine, and subsequent actions may beperformed based on the feedback.

In one embodiment, the strategy engine 235 performs an action by sendinga command and/or information to a controller of a subsystem of the EES205. The nature of the command and the type of information accompanyingthe command may depend on the controller to which the command and/orinformation is sent. For example, an identification of a manufacturingmachine 280 that caused a yield excursion, a suggestion of probablecauses of problems on the manufacturing machine 280, and instructions toschedule maintenance on the manufacturing machine 280 may be sent to theCMMS controller 270. At the same time, a performance metric thatassociates the manufacturing machine 280 to a predicted yield may besent to the S/D controller 265, in response to which the S/D controller265 can recalculate a cost/benefit analysis of processing product on themanufacturing machine 280 before the maintenance is performed. Otherdata and/or commands may also be sent to the R2R controller 260 tomodify process recipes run on the manufacturing machine 280, to the EPTcontroller 275 to adjust an equipment performance tracking rating forthe manufacturing machine 280, etc.

The run to run (R2R) controller 260 performs R2R control, which isdefined as a technique of modifying recipe parameters or the selectionof control parameters between process runs to improve processingperformance. A ‘run’ can be a manufacturing process of a batch, lot, oran individual wafer. The R2R controller 260 can control any set ofparameters that are relevant to the quality of the product beingproduced. Thus, parameters specific to a particular process such as CMPfinal thickness and final thickness uniformity, and more globalparameters such as CD, CD uniformity, electrical characteristics,throughput, and yield may all be controlled by the R2R controller 260.

The R2R controller 260 utilizes dynamic models of the system, processand/or machine it is controlling to determine what parameters should bemodified and how they should be modified. A R2R control model can bewritten in the form:

(Y ₁ ,Y ₂ , . . . , Y _(i) , . . . , Y _(m))=f(X ₁ ,X ₂ , . . . , X _(j), . . . , X _(n))  (1)

where each Y_(i) represents a quality variable output being controlledand each X_(j) represents a quality variable input that can be tuned toprovide that control.

In one embodiment, the R2R controller 260 includes multiple run to run(R2R) control modules (not shown). Each R2R control module can manageR2R control for a different process, set of processes, manufacturingtool, etc. For example, the R2R controller 260 may include a CMP R2Rcontrol module that manages a CMP process, an etch R2R control modulethat manages an etch process, and an inter-process R2R control modulethat manages uniformity control between the CMP process and the etchprocess. Therefore, the tunable inputs X_(j) can be equipment settingsin the traditional sense (e.g., process recipe parameters that controlequipment settings, such as temperature, pressure, gas flow rates,etc.), and can also be less traditional parameters such as gains ortargets of lower level R2R control modules.

In an example, the R2R controller may include a different R2R controlmodule at two different processes, impacting the same feature thataffects yield, but impacting that feature in different ways. Theprocesses may be lithography followed by etch, with the feature beingcritical dimension (CD). In this scenario there may be a CD patterningstep at lithography followed by an etchback process step at etch. Thesetwo processes are linked in that a pattern is set up in lithography sothat an opening can be “etched back” a certain amount at etch to hit acritical dimension (CD) target. Both process are controlled utilizingR2R control. In this example, the etchback step introduces variabilityin the CD with respect to target, but provides an opportunity for radialuniformity control of CD (i.e., minimization of the difference in CDbetween the center of the wafer and the outer edge. In general, thelonger the controlled etchback step, the higher the variability of CDwith respect to target, but the better the center-to-edge CD uniformity.

FIG. 5A illustrates a yield distribution plot 500 showing yield versesetchback time, in accordance with one embodiment of the presentinvention. Wafers entering the lithography process may have an incomingvariability and uniformity. Yield may be a function of closeness of CDto target. Thus, based on predicted yield, we can adjust our litho CDtarget and etchback targets to get the balance between CD variabilityand CD uniformity, thereby improving yield, as shown in FIG. 5A.Specifically, from predictions of yield loss profiles across wafer, thesystem adjusts our targeting of the etchback size (and thus time) toimprove yield. For example if the prediction shows sporadic across-waferyield loss, then lower the etchback amount (for lower variability); ifthe prediction shows yield loss at the center and outside (suggesting auniformity issue) then increase the etchback amount (for lowernon-uniformity).

The two example R2R control modules may operate according to thefollowing equations:

General, Wafer

CDslope=(CDcenter−CDedge)/150 mm  (2)

CDvariation=CDmax−CDmin, distributed uniformly (for simplicity)  (3)

CDproduct=the final CD specified for the product  (4)

At Lithography

CDave-postlitho=(CONSTcd-litho+ExposeRate*ExposeTime)nm  (5)

CDtargetlitho=CDtargetpostetch−CDetchbacktarget  (6)

CDslope-prelitho=CDslope-postlitho (uniformity not impacted bylitho)  (7)

CDvariation-prelitho=CDvariation-postlitho (variability not impacted bylitho)  (8)

At Etch

CDslope-postetch=CDslope-postlitho−RATEdifferential-etch×TIMEetch  (9)

CDave-postetch=CDave-postlitho+RATEetch×TIMEetch  (10)

CDvariation-postetch=CDvariation-postlitho+(VARIATIONetch×TIMEetch)  (11)

Yield Prediction

If (CDupperlimit=<CDpostetch=<CDlowerlimit then DieYield==TRUE ElseDieYield==FALSE  (12)

0=<YieldPredConfidence=<1  (13)

-   -   Where Die yield will be a function of the CDpostetch for that        die, which is a function of CDave postetch and        CDvariation-postetch, and die yield is a yes/no determination.

In one embodiment, equations (2) through (11) are used to estimate waferparameters and do not have to involve controller parameters. An exampleof a system that uses these equations could be implemented is as follows(where “block” refers to a module in the implementation):

-   -   A. Set up a data input block with settable variables of        CDslope-prelitho (or CDcenter-prelitho and CDedge-prelitho),        CDvariation-prelitho, CDproduct (the initial target CD)    -   B. Set up a lithography tool model block that implements        equations (5)-(8). CONSTcd-litho, ExposeRate, and        CDetchbacktarget are constants or need to have initial values        here so that will be settable (or have them in the input block        above). Initially have CDtargetpostetch==CDproduct. Initially        calculate ExposureTime so that CDave-postlitho==CDtargetlitho    -   C. Set up an etch tool model block that implements equations        (9)-(11). RATEdifferential-etch, RATEetch and VARIATIONetch are        constants or need to have initial values here so that will be        settable (or have them in the input block above). Initially        calculate TIMEetch so that CDave-postetch CDproduct.    -   D. Set up a Yield prediction block that utilizes the        CDslope-postetch, CDave-postetch and CDvariation-postetch values        from the etch block to determine which die are good/bad.        CDupperlimit, CDlowerlimit and YieldPredConfidence are constants        or need to have initial values here so that will be settable (or        have them in the input block above). Take the etch block output        CD values. Predict a CD for each of the die as follows:        -   a. One Center die:            CD1=CDave-postetch+[(CDslope-postetch×(75−0)]+CDvariation×[UNIF(0,1)−0.5]        -   b. Four die around center:            CD2=CDave-postetch+[CDslope-postetch×(75−50)]+{CDvariation×[UNIF(0,1)−0.5]}        -   c. Eight die in middle:            CD3=CDave-postetch+[CDslope-postetch×(75−100)]+{CDvariation×[UNIF(0,1)−0.5]}        -   d. Sixteen die around edge:            CD4=CDave-postetch+[CDslope-postetch×(75−150)]+{CDvariation×[UNIF(0,1)−0.5]}

The yield of each die on the processed wafer can be predicted. Acomparative yield analysis of each ring of dies on the wafer can then beperformed. A yield feedback logic (e.g., the R2R controller) can thenexecute the feedback rules and determine what adjustments to the controlenvironment should be made (e.g., increase the etchback size target ifanalysis indicates that radial non-uniformity is the primary source ofyield loss).

Specifically, in the above example the yield analysis block may producethe yield prediction feedback to the R2R control systems that makeschanges to the control environment based on the predicted yield andprediction confidence. Examples of rules that might be implemented inthis block are:

-   -   A. IF yield loss<YL-upperthreshold THEN do nothing, ELSE    -   B. IF yield loss=variable THEN decrease CDetchbacktarget        -   a. The etch tool is adding too much variability, while            uniformity is not a problem, so pull back on the etch step;            the amount is dependent on the confidence of the prediction            and an EWMA weighting factor.    -   C. IF yield loss at center and edge THEN increase        CDetchbacktarget        -   a. Uniformity control is problem and the etch tool needs            more time to do its job; the amount is dependent on the            confidence of the prediction and an EWMA weighting factor.    -   D. IF yield loss at center rings only THEN increase        CDtarget-postetch        -   a. This is more complicated; assuming the yield loss is a            one sided distribution, the system re-centers the target to            try and get all of the die within the limits for acceptable            yield.    -   E. IF yield loss at edge rings only THEN decrease        CDtarget-postetch        -   a. Same idea, but profile is shifted the other way.

In the above described example, two initial system conditions wereconsidered, namely (1) a controlled process that had low variability,but high radial non-uniformity, and (2) a controlled process that haslow radial non-uniformity and high variability. In both cases the yieldof the wafer was calculated for die in concentric rings.

FIGS. 5B-5E illustrate example yield results based on the abovedescribed example. The results of the yield prediction feedback (makingadjustments to R2R control parameters based on yield predictions)applied to an etchback controlled process that had low variability, buthigh radial non-uniformity are shown in FIGS. 5B and 5C. FIG. 5Billustrates that the etchback target is increased (and subsequently etchtime is increased) resulting in improved radial non-uniformity, i.e.,the distribution of the average CD among the rings decreases. At thesame time however, the CD variability within each ring increases.Eventually satisfactory yield levels are reached and the adjustments inetchback target diminish. FIG. 5C illustrates the evolution of etchbacktime, lithography exposure time, and yield for this example. Asillustrated, the lithography exposure time decreases as the etchbacktime increases. Also, as illustrated the yield increases (as balancebetween non-uniformity and variability of CD improves) until asatisfactory level is reached. Note that this control process isequivalent of traversing up the left side of the curve of FIG. 5A.

The results of yield prediction feedback applied an etchback controlledprocess that had low non-uniformity, but high variability are shown inFIGS. 5D-5E. FIG. 5D illustrates that the etchback target is decreased(and subsequently etch time is decreased) resulting in lower variabilityin each ring. However, at the same time distribution of average CD amongthe rings increases, indicating that non-uniformity is increasing.Eventually satisfactory yield levels are reached and the adjustments inetchback target diminish. FIG. 5E illustrates the evolution of etchbacktime, lithography exposure time, and yield for this example. As shown,the lithography exposure time increases as the etchback time decreases.Also, as shown the yield increases (as balance between non-uniformityand variability of CD improves) until a satisfactory level is reached.Note that this control process is equivalent of traversing up the rightside of the curve of FIG. 5A.

In one embodiment, the R2R controller 260 includes three levels of R2Rcontrol modules: a factory level R2R control module, inter-process R2Rcontrol modules, and intra-process R2R control modules. For example, aninter-process R2R control module managing uniformity control between aCMP tool and an etch tool may tune the target (Y_(i) parameter) of theCMP R2R control module in response to the quality uniformity output ofthe etch tool. Thus, the inter-process R2R control module may cause CMPsettings to be modified to pre-compensate for etch processnon-uniformity. In one embodiment, the outputs and/or inputs of the R2Rcontrol modules are weighted, e.g., so that the quality can be aweighted objective function.

FIG. 5F illustrates one embodiment of a hierarchical arrangement 502 ofR2R control modules. The hierarchical arrangement of R2R control modulesprovides for factory-wide control 505 of factory level qualityparameters, inter-process control 510 of inter-process level qualityparameters and process control 515 of intra-process level qualityparameters.

The objectives of the lower level control modules may not alwayscoincide with the objectives of the higher level control modules. Forexample, improvement of uniformity at a CMP tool does not necessarilyguarantee improvement of line yield. Thus, in one embodiment an optimalconfiguration of a factory-wide R2R control system enables higher levelcontrol modules to tune parameters of lower level control modules aspart of their control and/or optimization functionality.

In one embodiment, at the highest level of R2R control, the qualityparameters include one or more yield indicators. This allows yieldissues to be addressed directly with process control rather than throughprocess and design change. Yield predictors may be chosen to coincidewith yield quality parameters of the highest level R2R controlmodule(s). Since yield predictions are made from fault detection andclassification data provided during processing of actual product, thepredicted yield information is available to the controller at a R2Rcontrol frequency (e.g., new data is available whenever a product isprocessed or measured). This allows for automated multi-level R2Rcontrol of yield parameters to be supported. Note that the yieldprediction at each step of production can be utilized to tune the(sub-level) control parameters associated with the step of production,and can also be utilized to tune controllers to support downstreamcorrection (e.g., correction of a subsequent step), or provide othercontrol decisions that would aid in improving yield for current andfuture process runs.

In one embodiment, a factory R2R control module 520 provides factorylevel control for a product or product family. When new fault detectionand classification data and/or a new yield prediction is received, thefactory R2R control module 520 can adjust high level parameters toimprove the predicted yield. These adjustments may modify targets and/orsettings of one or more inter-process level control modules (e.g., theuniformity R2R control module 525, the CD R2R control module 530, etc.)and/or process level control modules (e.g., the deposition R2R controlmodule 535, the CMP R2R control module 540, the lithography R2R controlmodule 545, the etch R2R control module 550, etc.). In turn, theinter-process level control modules can adjust parameters to coincidewith new targets and/or settings provided by the factory R2R controlmodule 520, which may cause further changes to targets and/or settingsof the process level control modules. The process level R2R controlmodules may then adjust parameters of individual recipes, manufacturingmachines, etc. in response to the new targets and settings. For example,the deposition R2R control module 535 may adjust parameters of one ormore deposition manufacturing machines, the CMP R2R control module 540may adjust parameters of one or more CMP manufacturing machines 560,etc.

In one embodiment, an inter-process level uniformity R2R control module525 controls uniformity between CMP and etch processes. The uniformityR2R control module 525 adjusts CD targets, controller gains, andweighting of objective parameters (outputs) of the CMP R2R controlmodule 540 and the etch R2R control module 550 so as to controlpost-etch CD. The uniformity R2R control module 525 receives one or moreactions caused by a predicted yield excursion event that predicts thatpost-lithography there will be a yield issue due to lack of CDuniformity. The uniformity R2R control module 525 adjusts the targetingand weighting of the uniformity objective for the subsequent etch R2Rcontrol module 550. In response, the etch R2R control module 550 adjustsrecipe parameters on an etch machine 570 to bring them in line with thenew targeting and weighting, thus preventing yield loss due to CDnon-uniformity.

Note that, as with any prediction system, the quality of the yieldprediction is important. In one embodiment, the R2R controller(including all R2R control modules) takes yield prediction quality intoaccount, and adjusts the weighting for control of the yield parametersaccordingly. Techniques utilized for virtual metrology enhanced R2Rcontrol may be leveraged to perform such weighting.

Returning to FIG. 2, the S/D controller 265 uses information onproduction orders from ERP systems (cost, quantity, etc.), productprocess flow requirements, tool availability, product yield associatedwith manufacturing machines and/or product, and throughput requirementsto determine scheduling and dispatch for each of the manufacturingmachines 280 in the manufacturing environment 222. The S/D controller265 applies such information to a scheduling and dispatch policy (S/Dpolicy) that controls the assignment of product to manufacturingmachines 280. In one embodiment, the S/D controller 265 can dynamicallyand adaptively re-route product to continually optimize themanufacturing environment 222 from a scheduling perspective. Dynamicadjustments include adjustments that are made to the S/D policy on-line,while manufacturing is occurring. Adaptive adjustments includeadjustments that are made based on feedback information (e.g., yieldprediction) to provide an optimization of the S/D policy towards aspecified optimization function.

In one embodiment, the ultimate objective of the S/D policy is tooptimize factory profit. There is a profit associated with delivery ofproduct that has acceptable yield to a customer. There are costsassociated with scrap (wafers with unacceptable yield) as well aspenalties for delivery of product behind schedule. Therefore, it is agoal of the S/D policy to deliver a maximum number of high yield productin a minimum amount of time.

The S/D controller 165 may initially consider dispatching product to allmanufacturing machines capable of performing a particular process on aproduct. The S/D controller 165 may eliminate from consideration somemanufacturing machines based on one or more deterministic dispatchrules. For example, manufacturing machines that are under maintenance orotherwise not functional may automatically be removed fromconsideration. Manufacturing machines that already have a queue of apredefined length (e.g., 2 lots) may also be removed from consideration.Alternatively, the queues for manufacturing machines that have thepredefined length may be altered (e.g., by removing a product from thequeue). In such an embodiment, manufacturing machines having thepredefined queue length may not be removed from consideration.

Once certain manufacturing machines have been disqualified (removed fromconsideration), a dispatch score is determined for each remainingmanufacturing machine (e.g., for n remaining candidate manufacturingmachines) using a scoring algorithm. The scoring algorithm may includefactors that are associated with the product (e.g., priority, cost ofscrap, product process flow requirements, predicted yield associatedwith product, etc.), factors that are associated with the manufacturingmachine (e.g., cycle time, process capability, predicted yieldassociated with equipment, tool availability, etc.), and/or factors thatare associated with an interplay between the products and themanufacturing machines (e.g., queue length, throughput requirements,predicted yield associated with processing product on equipment). Thefactors in the scoring may or may not be normalized.

By incorporating yield prediction as a factor into the S/D policy, theS/D policy can be optimized to increase net profit. As mentioned above,yield predictions can be associated with a degree of confidence for theprediction. In one embodiment, the greater the confidence of a yieldprediction, the more heavily the yield prediction is weighted in thescoring algorithm.

In one embodiment, a different scoring algorithm is used for eachproduct. The scoring algorithm for each product can be optimized basedon factors that are specific to that product. For example, a penalty fornot finishing one product on time may be higher than a penalty for notfinishing another product on time. Accordingly, the product having thehigher penalty may have a higher weight for a queue delay cost factor.In one embodiment, for each manufacturing machine a dispatch score iscalculated based on a number of weighted factors. A weighted scorealgorithm in one embodiment is normalized as follows:

$\begin{matrix}{{Score}_{Tool} = {{\frac{W_{1}}{\sum\limits_{i = 1}^{n}W_{i}} \cdot {Factor}_{1}} + {\frac{W_{2}}{\sum\limits_{i = 1}^{n}W_{i}} \cdot {Factor}_{2}} + \ldots + {\frac{W_{n}}{\sum\limits_{i = 1}^{n}W_{i}} \cdot {Factor}_{n}}}} & (14)\end{matrix}$

Where W₁ through W_(n) are weights that are applied to factors 1 throughn for a particular product, and where tool represents a particularmanufacturing machine for which the dispatch score is calculated.

In one embodiment, the factors included in the scoring algorithm arecycle time cost, down time cost, process capability cost, queuing delaycost and yield related cost. The factors may be calculated according tothe following equations:

$\begin{matrix}\begin{matrix}{{Factor}_{1} = {CycleTimeCost}} \\{= \frac{{CycleTime}_{tool} - {CycleTime}_{Avg}}{{CycleTime}_{Avg}}}\end{matrix} & (15) \\\begin{matrix}{{Factor}_{2} = {DownTimeCost}} \\{= \frac{{DownTime}_{tool} - {DownTime}_{Avg}}{{DownTime}_{Avg}}}\end{matrix} & (16) \\\begin{matrix}{{Factor}_{3} = {ProcessCapabilityCost}} \\{= \frac{{Cpk}_{Avgl} - {Cpk}_{Tool}}{{Cpk}_{Avg}}}\end{matrix} & (17) \\\begin{matrix}{{Factor}_{4} = {QueuingDelayCost}} \\{= \frac{Q_{Avg} - Q_{Tool}}{Q_{Avg}}}\end{matrix} & (18) \\\begin{matrix}{{Factor}_{5} = {YieldRelativeBenefit}} \\{= \frac{{Yield}_{tool} - {Yield}_{Avg}}{{Yield}_{Avg}}}\end{matrix} & (19)\end{matrix}$

Where tool represents a value associated with a particular manufacturingmachine, and avg represents the average value across all manufacturingmachines of a particular type.

For all of these factors, the components that go into the calculationscan be chosen as constants for each tool, except for queuing delay. Thisis because queuing delay is dependent on how many lots are dispatched toa particular tool at a particular time. Use of the yield factor (basedon yield prediction) in the S/D analysis gives a higher gross profitthan can be achieved without use of the yield factor.

In one embodiment, the S/D controller 165 solves three schedulingproblems. First, when a lot is available to be processed, whichmanufacturing machine's queue should it enter? Second, when amanufacturing machine is ready to process product, which product in itsqueue should it process? Third, when a queue of a manufacturing machineis empty, which of the product not queued should be queued at thismanufacturing machine? These three problems can be solved by the S/Dcontroller 165 by comparing dispatch scores that have been generated foreach manufacturing machine and for each product. In one embodiment, aseparate dispatch score is generated for each combination of a productand a manufacturing machine. Products may then be scheduled tomanufacturing machines to maximize total dispatch scores.

In solving the first problem, each manufacturing machine that isavailable (i.e., its queue is not full) is evaluated utilizing equation(1) utilizing the factor weights associated with product to beprocessed. In solving the second and third problems, the factor weightsassociated with particular product are used to differentiate theproducts in the equipment queue or waiting to be queued to determine theoptimal product that is to be next processed or next queued for aparticular manufacturing machine.

With this problem setup the analysis may proceed as follows: determineproduct and equipment constant information that will impact the S/Dpolicy; calculate optimal weights for maximizing profit; and applyscoring analysis to get a dispatch strategy. The dispatch strategy forone lot may impact the next lot from the perspective of recalculation ofthe queue information. The above analysis enables calculation of theoptimal factory profit, taking into consideration the yield predictioninformation.

In one embodiment, the first problem, second problem and third problemare solved using a routing algorithm. The routing algorithm includes thescoring algorithm. Therefore, the routing algorithm can calculatedispatch scores for each combination of product and manufacturingmachine, and then determine what product to assign to whichmanufacturing machines based on the dispatch scores.

TABLE 1 Product Table Part Rate/Day Revenue ScrapCost LateCost P1 2001000 200 250 P2 10 5000 1000 1000 P3 50 2000 400 500

TABLE 2 Manufacturing Machine Table Eqp CycleTime AvgDown ProcessQualityYield E1 24:00 7% 95 99% E2 22:00 6% 97 95% E3 20:00 5% 100 90%

Table 1 and Table 2 provide example equipment and product attributes.Note that there are three products (P1, P2 and P3 shown in table 2) andthree manufacturing machines (E1, E2 and E3 shown in table 3). For eachproduct, desired production rate, revenue, cost per scrap and “latecost” penalty per day are all indicated on a per lot basis. For eachmanufacturing machine, values for cycle time, down time, process quality(i.e., process capability) and yield are indicated. Product rates perday, profits and costs associated with product, and equipment attributesthat relate to the S/D policy decision process are all dictated. Queuelength is not provided here as a constant because, as noted above, it isa variable that results from the interplay between product and equipmentand is a function of the S/D policy chosen. With this information, thefactor weights can be determined for the various factors applied to thevarious parts.

TABLE 3 Part Factor Weights Part P1 P1 P1 P1 P1 P2 P2 P2 P2 P2 P3 P3 P3P3 P3 Factor Ct Up Cp Q Y Ct Up Cp Q Y Ct Up Cp Q Y Weight 3.2 9.1 0 2.72.2 .25 4.5 0 8.1 8 .4 1.9 0 6.8 3.6

Table 3 shows example computed optimal weights for each of the threeproducts. In table 3, Ct represents cycle time, Up represents up time,Cp represents process capability, Q represents queuing delay, and Yrepresents predicted yield. As is shown in table 1, P2 has the highestcost for scrap. Accordingly, P2 assigns the highest weight to predictedyield as opposed to P1 and P3.

FIG. 5G illustrates a plot that shows factory profit as a function ofthe yield factor weight, in accordance with one embodiment of thepresent invention. Yield factor is shown along the horizontal axis, andfactory profit is shown along the vertical axis. As illustrated, if theyield factor weight is set to 0 (yield prediction is not considered bythe S/D controller), the factory profit is $3,230,000 per day. In theillustrated example, as the yield factor weight is increased to 36,profit rises to a maximum of $3,360,000 per day. As the yield factorweight is increased beyond 36, factory profit declines. This illustratesthe potentially significant benefit that using yield prediction to makeS/D decisions can provide. Note that as the accuracy of the yieldprediction decreases, the optimal weighting of the yield factor wouldlikely decrease, however a profit benefit over a solution with no yieldinformation would still be observed.

As new yield prediction information is received, the S/D controller 265may update dispatch assignments of product to equipment. For example, ifthe yield predictor 228 is predicting that product ‘A’ will have a 4%yield hit when sent to tool Litho-1, but only a 2% hit if sent to toolLitho-2, the S/D controller 265 could have a rule that incorporates thatinformation along with information on WIP ahead of these tools as wellas just-in-time (JIT) production information to make “yield conscious”S/D decisions. This rule could be a prioritized tree structure formaking decisions, or could be a weighted calculation of the opportunitycost of sending the lot to Litho-1 versus Litho-2. Since the yieldprediction information is available in real-time, the S/D controller 265can utilize this information to make real-time S/D decisions.

The CMMS controller 270 maintains maintenance schedules and maintenancehistories, current statuses of manufacturing machines and metrologytools, and information on any additional maintenance operations withinthe manufacturing environment 222. The CMMS controller 270 may schedulemaintenance events based on timing, part count (e.g., wafers processed),and/or events received such as tool alarms. Such maintenance events mayinclude, taking a manufacturing machine out of production, assigningpersonnel to service the manufacturing machine, reserving materials,recording costs, tracking relevant information such as a cause of theproblem (e.g., including associating the cause to a yield excursionevent), etc.

In one embodiment, actual yield excursions are tied to maintenanceevents in a yield prediction model used by the yield predictor 228. Sucha yield prediction model may have been generated by comparing historicalyield data with historical maintenance data to determine the correlationbetween specific yield excursion modes and subsequent maintenance modes.With such a model in place, the yield prediction can be utilized by theCMMS controller 270 to trigger a maintenance event.

The EPT subsystem enables the EES to track basic equipment performanceautomatically without operator or host input. The EPT subsystem providesautomatic reporting of equipment state changes, time in a state, andreasons why a particular piece of equipment is in the state (e.g.,reasons why a piece of equipment is blocked from performing a task).Equipment states can include waiting for a product, available,processing product, in maintenance, blocked from performing a particulartask, etc. Yield prediction information can be integrated into the EPTsubsystem to provide greater information as to why a piece of equipment(e.g., a manufacturing machine 280) is in a particular state (e.g., whythe piece of equipment is blocked).

In one embodiment the factory-wide controller 230 includes a userinterface 298. The user interface may include a graphical user interfacefor the ECA strategy engine shown in FIG. 4A. The user interface 298 mayalso include a reconfigurable multi-component dashboard interface thatcan provide the exact information that is needed to a particular userclass. The dashboard interface provides ease-of-use by only providingthe user with the information he/she needs to see without displayingunnecessary information. Moreover, the dashboard can provide informationfrom multiple components on one screen so that the user can see a morecomplete picture of the manufacturing environment 222. The dashboardinterface can also provide a re-usable solution across a user classthereby allowing the leveraging of re-usable training, documentation,etc.

The YMS 220 is responsible for managing yield and maintaining one ormore yield prediction models. In one embodiment, the YMS 220 includes ayield analyzer 250 and a yield model generator 255. The yield analyzer250 receives yield test results (e.g., based on e-test results, waferacceptance testing (WAT), wafer sort testing, final testing, etc.) andanalyzes the results to determine yield trends, yield correlations, etc.If yield excursions are detected, the yield analyzer 250 classifies theyield excursions.

Yield model generator 255 can generate yield prediction models through acombination of Design-of-Experiments (DOE) style analysis and input fromprocess and yield experts. Over time, a yield prediction model librarycan be developed to shorten the model set discovery and definition time.Such a model library can include process specific, process-productspecific, equipment specific, equipment-product specific, and equipmentmodel specific categories. The yield prediction model library may bestored in consolidated data store 215.

In one embodiment, yield model generator 255 compares actual yieldinformation (when available) with predicted information, and adjustsyield models accordingly. Once new yield information has been analyzedand classified by yield analyzer 250, for example, yield model generator255 may combine the new yield information with existing yieldinformation to generate a new or updated yield prediction model. If aPLS yield prediction model is used, PLS model adjustment techniques suchas the nonlinear iterative partial least squares (NIPALS) algorithm canbe utilized to modify the yield prediction model. The updated yieldprediction model may then be sent to the yield predictor 228 toreplace/update an existing yield prediction model used by the yieldpredictor 228. As systems evolve over time, the relationship betweeninputs and metrology indicator outputs changes (e.g., due to thebuild-up of polymers in an etch chamber between cleans). A dynamic yieldprediction model that is updated periodically or continuously as newdata is gathered can account for such changes.

In one embodiment, a baseline yield model or models are determined usingDOE type data. The baseline yield model can then be changed as productyield information becomes available. Thus, both original DOE data andthe latest measured data can be utilized together.

In one embodiment, a moving window technique is used to update the yieldprediction model. One embodiment of such a moving window technique isshown in FIG. 6. In the moving window technique, DOE data is initiallyused to generate a yield prediction model. As new data is received, aportion of the data used in the prediction model is discarded, and aportion of the data used in the prediction model may be retained. In oneembodiment, the DOE data is always retained, and only subsequentlyreceived data may be discarded. In one embodiment, oldest data (otherthan DOE data) is discarded. In such an embodiment, a moving window isused, wherein all data that is outside of the moving window isdiscarded, and all data within the moving window is retained. Thisallows the yield prediction model to evolve over time. A weighting maybe applied to the retained data. The size of the window and the relativeweighing of data impact the responsiveness of the model to changingconditions and its ability to reject noise. For example, a smallerwindow has an increased responsiveness, but is more susceptible tonoise.

FIG. 7A illustrates a process flow diagram 700 for a semiconductorproduct, in accordance with one embodiment of the present invention. Theprocess flow reflects operations performed by numerous systems andmachines in a manufacturing environment, such as manufacturing machines,metrology devices, servers, controllers, etc.

At block 702, a layer of material is deposited (or grown) on a substrateof a beginning product. The beginning product may be a bare substrate,or may be a patterned substrate that has undergone previous processing.During the deposition (block 702), fault detection and classification(FDC) analysis (block 714) of sensor data is performed (e.g., by FDCcomponent 226 of FIG. 2B). A yield prediction is then made (block 734)based on the FDC analysis (e.g., by yield predictor 228 of FIG. 2B).

Once the layer has been deposited on the product substrate, the productmay be evaluated by a metrology device (block 716). At block 716, athickness measurement is performed on the newly deposited layer. Theyield prediction can be updated based on the thickness measurementresults (block 726).

The newly deposited layer is next patterned by a lithography machine(block 704). During the patterning process, FDC analysis of sensor datacollected from the lithography machine is performed (block 718). Theyield prediction is then updated based on the FDC analysis (block 734).

After the layer has been patterned, the product may be evaluated by ametrology device (block 720). At block 720, a critical dimensionalignment measurement is performed. The yield prediction can be updatedbased on the critical dimension alignment measurement results (block734).

In a subsequent process, the patterned layer is etched to removeportions of the layer (block 706). During the etch process, FDC analysisof sensor data collected from an etch machine is performed (block 722).The yield prediction is then updated based on the FDC analysis (block734).

After portions of the patterned layer have been removed, the product mayagain be evaluated by a metrology device (block 724). At block 724,another critical dimension alignment measurement is performed. The yieldprediction can be updated based on the new critical dimension alignmentmeasurement results (block 734).

In a subsequent process, the product is implanted (e.g., doped withboron) by an implanter (block 708). During the implant process, FDCanalysis of sensor data collected from the implanter is performed (block726). The yield prediction is then updated based on the FDC analysis(block 734).

Once the product has been implanted, the product may again be evaluatedby a metrology device (block 728). At block 728, a sheet resistancecheck is performed on the implanted regions of the product. The yieldprediction can be updated based on the sheet resistance measurementresults (block 734).

In a subsequent process, chemical mechanical planarization (CMP) isperformed on the product to remove the patterned layer. During the CMPprocess, FDC analysis of sensor data collected from a CMP machine isperformed (block 730). The yield prediction is then updated based on theFDC analysis (block 734).

After the product has been processed by the CMP, the product may againbe evaluated by a metrology device (block 732). At block 732, athickness test is performed to determine whether all of the patternedlayer has been removed. The yield prediction can be updated based on thethickness measurement results (block 734).

Once all processing has been performed, the product may be electricallytested (block 712). A yield prediction may be updated based on thee-test results. Finally, yield may be measured for the finished product.

At any point during the above processing, a yield prediction mayindicate a yield excursion event. If a yield excursion event ispredicted, an action or actions may be performed (e.g., by strategyengine 235 of FIG. 2) to mitigate yield loss in the product beingmonitored and/or in future product. The yield prediction may includeboth the yield excursion event and one or more yield excursionconditions. Depending on the yield excursion event and/or the yieldexcursion conditions, the performed actions may pertain to R2R control(block 738), S/D control (block 740), CMMS control (block 742) and/orEPT control (block 744). For example, if a yield excursion event wasreported based on the measurements of block 720, R2R control (block 838)may be performed to adjust a CD target at the etch process (block 706).Such an adjustment may mitigate or eliminate the earlier predicted yieldexcursion.

FIG. 7B illustrates a process flow diagram 750 for a semiconductorproduct, in accordance with another embodiment of the present invention.The process flow reflects operations performed by numerous systems andmachines in a manufacturing environment, such as manufacturing machines,metrology devices, servers, controllers, etc.

At block 702, a layer of material is deposited (or grown) on a substrateof a beginning product. The beginning product may be a bare substrate,or may be a patterned substrate that has undergone previous processing.During the deposition (block 702), fault detection and classification(FDC) analysis (block 714) of sensor data is performed (e.g., by FDCcomponent 226 of FIG. 2). Virtual metrology is then performed (block752) to determine a predicted thickness of the layer (block 762). Ayield prediction is then made (block 734) based on the FDC analysis andthe predicted thickness (e.g., by yield predictor 228 of FIG. 2).

Once the layer has been deposited on the product substrate, the productmay be evaluated by a metrology device (block 716). At block 716, athickness measurement is performed on the newly deposited layer. Thethickness measurement data can be used to update a virtual metrologymodel used to predict the thickness of the layer (block 752). The yieldprediction can also be updated based on the thickness measurementresults (block 726).

The newly deposited layer is next patterned by a lithography machine(block 704). During the patterning process, FDC analysis of sensor datacollected from the lithography machine is performed (block 718). Virtualmetrology is then performed (block 754) to determine a predictedcritical dimension alignment based on the sensor data and the metrologydata collected before the lithography process began (block 764). Theyield prediction is then updated based on the FDC analysis and thevirtual metrology data (block 734).

After the layer has been patterned, the product may be evaluated by ametrology device (block 720). At block 720, a critical dimensionalignment measurement is performed. The metrology data can be used toupdate a virtual metrology model used to predict the critical dimensionalignment (block 754). The yield prediction can also be updated based onthe critical dimension alignment measurement results (block 734).

In a subsequent process, the patterned layer is etched to removeportions of the layer (block 706). During the etch process, FDC analysisof sensor data collected from an etch machine is performed (block 722).Virtual metrology is then performed (block 756) to determine a predictedcritical dimension alignment based on the sensor data and the metrologydata collected before the etch process began (block 766). The yieldprediction is then updated based on the FDC analysis and the virtualmetrology data (block 734).

After portions of the patterned layer have been removed, the product mayagain be evaluated by a metrology device (block 724). At block 724,another critical dimension alignment measurement is performed. Themetrology data can be used to update a virtual metrology model used topredict the new critical dimension alignment (block 754). The yieldprediction can also be updated based on the new critical dimensionalignment measurement results (block 734).

In a subsequent process, the product is implanted (e.g., doped withboron) by an implanter (block 708). During the implant process, FDCanalysis of sensor data collected from the implanter is performed (block726). Virtual metrology is then performed (block 758) to determine apredicted sheet resistance based on the sensor data and the metrologydata collected before the implant process began (block 768). The yieldprediction is then updated based on the FDC analysis and the virtualmetrology data (block 734).

Once the product has been implanted, the product may again be evaluatedby a metrology device (block 728). At block 728, a sheet resistancecheck is performed on the implanted regions of the product. The yieldprediction and the model used to predict the sheet resistance can beupdated based on the sheet resistance measurement results (block 734).

In a subsequent process, chemical mechanical planarization (CMP) isperformed on the product to remove the patterned layer. During the CMPprocess, FDC analysis of sensor data collected from a CMP machine isperformed (block 730). Virtual metrology is then performed (block 760)to determine a predicted thickness based on the sensor data and themetrology data collected before the CMP process began (block 770). Theyield prediction is then updated based on the FDC analysis and thevirtual metrology data (block 734).

After the product has been processed by the CMP, the product may againbe evaluated by a metrology device (block 732). At block 732, athickness test is performed to determine whether all of the patternedlayer has been removed. The yield prediction and the virtual metrologymodel used to predict the thickness can be updated based on thethickness measurement results (block 734).

Once all processing has been performed, the product may be electricallytested (block 712). A yield prediction may be updated based on thee-test results. Finally, yield may be measured for the finished product.

At any during the above processing, a yield prediction may indicate ayield excursion event. If a yield excursion event is predicted, anaction or actions may be performed (e.g., by strategy engine 235 of FIG.2) to mitigate yield loss in the product being monitored and/or infuture product. The yield prediction may include both the yieldexcursion event and one or more yield excursion conditions. Depending onthe yield excursion event and/or the yield excursion conditions, theperformed actions may pertain to R2R control (block 738), S/D control(block 740), CMMS control (block 742) and/or EPT control (block 744).

FIG. 8 illustrates a flow diagram of one embodiment for a method 800 ofperforming automated actions by subsystems of an EES in response toyield predictions. The method may be performed by processing logic thatmay comprise hardware (e.g., circuitry, dedicated logic, programmablelogic, microcode, etc.), software (such as instructions run on aprocessing device), or a combination thereof. In one embodiment, method800 is performed by subsystems of the equipment engineering system 205of FIG. 2.

Referring to FIG. 8, method 800 includes collecting data by an equipmentengineering system (block 805). The collected data includes dataassociated with a manufacturing process, a manufacturing tool and/or amanufactured product. Such data may be received from a manufacturingmachine during processing of a product, from a metrology tool duringmeasuring of a product, or from a data store. In one embodiment, thedata is collected by FDC component 226 of FIG. 2. In a furtherembodiment, the FDC component 226 performs fault detection andclassification using the data, and reduces the data to a reduced dataset that can be used for yield prediction. The FDC component 226 mayalso perform virtual metrology to predict metrology values.

At block 810, processing logic predicts an end-of-line yield excursion.The end-of-line yield excursion may be predicted by a yield predictor228 of FIG. 2 by comparing the data to a yield prediction model. In oneembodiment, the yield predictor 228 receives a reduced data set from theFDC component 226, and performs yield prediction by applying the reduceddata set to the yield prediction model. In a further embodiment, theyield predictor 228 receives virtual metrology data, and uses thevirtual metrology data in combination with the reduced data set topredict yield. The yield prediction may include a yield excursion eventand one or more yield excursion conditions. One such yield excursioncondition may be a yield prediction quality indicator.

At block 815, processing logic performs an automated action in responseto the yield prediction. In one embodiment, the automated action isdetermined by strategy engine 235 of FIG. 2. The strategy engine 235 maybe an event-condition-action strategy engine. The event-condition-actionstrategy engine can compare the predicted yield excursion, yieldexcursion event and one or more yield excursion conditions to acollection of rules. One or more actions may be triggered if the yieldexcursion event and/or yield excursion conditions match a yieldexcursion event and/or yield excursion conditions included in a rule.

At block 825, processing logic determines whether the automated actionadjusts a parameter of a run to run (R2R) controller. If the automatedaction adjusts a parameter of a R2R controller, the method initiatesmethod 900 of FIG. 9. Whether or not the automated action adjusts aparameter of the R2R controller, the method proceeds to block 830.

At block 830, processing logic determines whether the automated actionadjusts a parameter of a scheduling and dispatch (S/D) controller. Ifthe automated action adjusts a parameter of the S/D controller, themethod initiates method 1000 of FIG. 10. Whether or not the automatedaction adjusts a parameter of the S/D controller, the method proceeds toblock 835.

At block 835, processing logic determines whether the automated actionadjusts a parameter of a computerized maintenance management system(CMMS) controller. If the automated action adjusts a parameter of theCMMS controller, the method initiates method 1100 of FIG. 11. Whether ornot the automated action adjusts a parameter of the CMMS controller, themethod proceeds to block 840.

At block 840, processing logic determines whether the automated actionadjusts a parameter of an equipment performance tracking (EPT)controller. If the automated action adjusts a parameter of the EPTcontroller, the method initiates method 1200 of FIG. 12. Otherwise themethod ends.

FIG. 9 illustrates a flow diagram of one embodiment for a method 900 oftuning a run to run (R2R) controller in response to a yield prediction.The method may be performed by processing logic that may comprisehardware (e.g., circuitry, dedicated logic, programmable logic,microcode, etc.), software (such as instructions run on a processingdevice), or a combination thereof. In one embodiment, method 900 isperformed by R2R controller 260 of FIG. 2. Method 900 may be initiatedby method 800 of FIG. 8.

Referring to FIG. 9, method 900 includes receiving predicted yieldexcursion information by the R2R controller (block 905). At block 910,the R2R controller determines whether the yield excursion is associatedwith a missed factory-wide performance target. An example of afactory-wide performance target is yield. For example, if the predictedyield is worse than a yield threshold for a product, then a factory-wideyield performance target may not be satisfied for the product. If theyield excursion is associated with a missed factory-wide performancetarget, the method proceeds to block 915. Otherwise, the methodcontinues to block 920.

At block 920, the run to run controller determines whether the yieldexcursion is associated with missed inter-process performance targets.Examples of such inter-process performance targets include criticaldimension control between processes and/or between layers, uniformitycontrol between processes, etc. if the yield excursion is associatedwith a missed inter-process performance target, the method proceeds toblock 925. Otherwise, the method proceeds to block 930.

At block 915, the run to run the controller adjusts parameters of afactory wide run to run control module. The parameters of the factorywide run to run control module may include targets and gains used byinter-process run to run control modules and or intra-process run to andcontrol modules. [James, can you provide an example?].

At block 925, the run to run controller adjusts parameters of one ormore inter-process run to run control modules. The parameters of the oneor more inter-process run to run control modules may be adjusted inresponse to adjustments made to the factory-wide run to run controlmodule and/or in response to the predicted yield excursion. Suchparameters may include targets and gains of intra-process run to runcontrol modules. The method proceeds to block 935.

At block 930, the run to run controller determines whether the yieldexcursion is associated with missed intra-process performance targets.Examples of intra-process performance targets include processingparameters such as gas flow rates, pressure, temperature and productparameters such as film thickness, sheet resistance, critical dimensionuniformity, etc. If the yield excursion is associated with missedintra-process performance targets, the method proceeds to block 935.Otherwise, the method ends.

At block 935, the run to run controller adjusts parameters of one ormore intra-process run to run control modules. For example, the run torun controller may adjust gas flow rates, temperature settings, pressuresettings, and so forth. The parameters of the one or more inter-processrun to run control modules may be adjusted in response to adjustmentsmade to the factory-wide run to run control module, in response toadjustments made to the inter-process run to run control modules and/orin response to the predicted yield excursion. The method then ends.

FIG. 10 illustrates a flow diagram of one embodiment for a method 1000of routing product through manufacturing machines by a S/D controller.The method may be performed by processing logic that may comprisehardware (e.g., circuitry, dedicated logic, programmable logic,microcode, etc.), software (such as instructions run on a processingdevice), or a combination thereof. In one embodiment, method 1000 isperformed by S/D controller 265 of FIG. 2. Method 1000 may be initiatedby method 800 of FIG. 8.

Referring to FIG. 10, method 1000 includes receiving predicted yieldexcursion information by the S/D controller (block 1005). At block 1010,the S/D controller adjusts a weight applied to a manufacturing toolassociated with the yield excursion based on the predicted yield. Forexample, if a manufacturing tool causes a yield prediction for aspecific product to be high, the manufacturing tool may be weighted suchthat the specific product is more likely to be processed on themanufacturing tool. Likewise, if the manufacturing tool causes a yieldprediction for a specific product to be low, the manufacturing tool maybe weighted such that the specific product is less likely to beprocessed on the manufacturing tool.

At block 1015, the S/D controller computes a cost-benefit analysis formanufacturing a product on one or more manufacturing tools. Thecost-benefit analysis may be calculated using the routing algorithm. Therouting algorithm can include as variables the number of manufacturingmachines available, the amount of product that needs to be processed,the number of additional products that need to be processed, the weightsof the available manufacturing machines for the product and for theadditional products, etc. If an infinite weight has been applied to anymanufacturing machines (e.g., to the manufacturing machine associatedwith the yield excursion), then no product will be processed on thatmanufacturing machine. An infinite weight may be applied to amanufacturing machine for a single product (e.g., for the product thatexperienced the yield excursion), in which case other products may stillbe scheduled on the manufacturing machine. Alternatively, the infiniteweight may be applied to the manufacturing machine for all products, inwhich case no products will be processed on the manufacturing machineuntil it undergoes maintenance.

At block 1020, the S/D controller determines which manufacturing tool toprocess the product in based on the cost benefit analysis. The methodthen ends.

FIG. 11 illustrates a flow diagram of one embodiment for a method 1100of scheduling maintenance for a manufacturing machine in response to apredicted yield excursion. The method may be performed by processinglogic that may comprise hardware (e.g., circuitry, dedicated logic,programmable logic, microcode, etc.), software (such as instructions runon a processing device), or a combination thereof. In one embodiment,method 1100 is performed by CMMS controller 270 of FIG. 2. Method 1100may be initiated by method 800 of FIG. 8.

Referring to FIG. 11, method 1100 includes receiving predicted yieldexcursion information by the CMMS controller (block 1105). At block1110, the CMMS controller further receives information on a source of aproblem that caused the predicted yield excursion. The information onthe source of the problem may be based on yield excursion datamaintained by a yield management system and/or may be associated with afault classification.

At block 1115, the CMMS controller schedules a maintenance event for amanufacturing tool that is associated with the predicted yieldexcursion. At block 1120, maintenance personnel are notified of thepotential source of the problem. For example, if a yield excursion ispredicted based on out of control gas flow rates, the gas injectionsystem for the manufacturing tool may be identified as the source of theproblem. This helps maintenance personnel to quickly identify and solveproblems.

FIG. 12 illustrates a flow diagram of one embodiment for a method 1200of tracking equipment performance. The method may be performed byprocessing logic that may comprise hardware (e.g., circuitry, dedicatedlogic, programmable logic, microcode, etc.), software (such asinstructions run on a processing device), or a combination thereof. Inone embodiment, method 1200 is performed by EPT controller 275 of FIG.2. Method 1200 may be initiated by method 800 of FIG. 8.

Referring to FIG. 12, method 1200 includes receiving predicted yieldexcursion information by the EPT controller (block 1205). At block 1210,the EPT controller associates the yield excursion information to a stateof a manufacturing tool associated with the yield excursion. Forexample, if the manufacturing tool that caused the yield excursion wasplaced into maintenance due to the yield excursion, then its state maybe, “unavailable.” The EPT controller can further specify that themanufacturing machine is unavailable because of the predicted yieldexcursion.

FIG. 13A illustrates a flow diagram of one embodiment for a method 1300of automatically performing actions by a strategy engine in response toyield predictions. The method may be performed by processing logic thatmay comprise hardware (e.g., circuitry, dedicated logic, programmablelogic, microcode, etc.), software (such as instructions run on aprocessing device), or a combination thereof. In one embodiment, method1300 is performed by strategy engine 235 of FIG. 2.

Referring to FIG. 13A, method 1300 includes receiving an end-of-lineyield prediction by the strategy engine (block 1305). In one embodiment,the strategy engine is an event-condition-action strategy engine that isgraphically configurable. At block 1310, the strategy engine determineswhether the yield prediction includes a yield excursion event and/or anyyield excursion conditions. A yield excursion event may occur wheneverthe predicted yield is below a predetermined yield threshold. Differentyield thresholds may apply to different products. Examples of yieldexcursion conditions include contributors to the yield excursion event(e.g., out of control pressure, excessive particle count, poor criticaldimension uniformity, etc.) and a confidence (quality) of the yieldprediction. If the yield prediction includes no yield excursion event oryield excursion conditions, the method ends. If it does include a yieldexcursion event or a yield excursion condition, the method proceeds toblock 1315.

At block 1315, the strategy engine compares the yield excursion eventand/or yield excursion conditions to one or more rules. At block 1320,if the yield excursion event and/or yield excursion conditionscorrespond to a rule, the method proceeds to block 1325. Otherwise, themethod ends.

At block 1325, the strategy engine performs an action included in therule that corresponds to the yield excursion event and/or yieldexcursion conditions. The action pertains to a component (e.g., asubsystem) of an equipment engineering system. If multiple rulescorrespond to the yield excursion event and/or yield excursionconditions, then multiple actions may be performed. For example, a firstrule may cause a maintenance event to be scheduled, a second rule maycause parameters of a R2R control module to be adjusted, etc. Some rulesmay preempt other rules. For example, if a first yield excursioncondition is reported, actions included in a first rule may beperformed. However, if both the first yield excursion condition and asecond yield excursion condition are reported, actions included in asecond rule may be performed, and actions included in the first rule maynot be performed. The actions may cause the predicted yield excursion tobe mitigated and/or may prevent future product from experiencing thesame yield excursion event.

At block 1330, if the action caused an updated yield prediction to begenerated, the method returns to block 1305 and the updated yieldprediction is reviewed by the strategy engine. Otherwise the methodends.

FIG. 13B illustrates a flow diagram of another embodiment for a method1350 of automatically performing actions by a strategy engine inresponse to yield predictions. The method may be performed by processinglogic that may comprise hardware (e.g., circuitry, dedicated logic,programmable logic, microcode, etc.), software (such as instructions runon a processing device), or a combination thereof. In one embodiment,method 1350 is performed by strategy engine 235 of FIG. 2.

Referring to FIG. 13B, method 1350 includes receiving an end-of-lineyield prediction by the strategy engine (block 1355). At block 1360, theend-of-line yield prediction is sent to a R2R controller and a S/Dcontroller. At block 1365, the strategy engine receives information fromthe R2R controller that identifies which manufacturing machines can besufficiently modified to support a process change that will mitigate thepredicted yield excursion.

At block 1370, the strategy engine receives product schedulinginformation from the S/D controller. The product scheduling informationmay identify which of the manufacturing machines are available toprocess the product. At block 1375, the strategy engine determines amanufacturing machine on which to process the product based on theinformation received from the S/D controller and the R2R controller.This decision may then be sent to the S/D controller and to the R2Rcontroller so that they can implement the decision (block 1380). Themethod then ends.

FIG. 14 illustrates a diagrammatic representation of a machine in theexemplary form of a computer system 1400 within which a set ofinstructions, for causing the machine to perform any one or more of themethodologies discussed herein, may be executed. In alternativeembodiments, the machine may be connected (e.g., networked) to othermachines in a Local Area Network (LAN), an intranet, an extranet, or theInternet. The machine may operate in the capacity of a server or aclient machine in a client-server network environment, or as a peermachine in a peer-to-peer (or distributed) network environment. Themachine may be a personal computer (PC), a tablet PC, a set-top box(STB), a Personal Digital Assistant (PDA), a cellular telephone, a webappliance, a server, a network router, switch or bridge, or any machinecapable of executing a set of instructions (sequential or otherwise)that specify actions to be taken by that machine. Further, while only asingle machine is illustrated, the term “machine” shall also be taken toinclude any collection of machines (e.g., computers) that individuallyor jointly execute a set (or multiple sets) of instructions to performany one or more of the methodologies discussed herein.

The exemplary computer system 1400 includes a processor 1402, a mainmemory 1404 (e.g., read-only memory (ROM), flash memory, dynamic randomaccess memory (DRAM) such as synchronous DRAM (SDRAM) or Rambus DRAM(RDRAM), etc.), a static memory 1406 (e.g., flash memory, static randomaccess memory (SRAM), etc.), and a secondary memory 1418 (e.g., a datastorage device), which communicate with each other via a bus 1430.

Processor 1402 represents one or more general-purpose processing devicessuch as a microprocessor, central processing unit, or the like. Moreparticularly, the processor 1402 may be a complex instruction setcomputing (CISC) microprocessor, reduced instruction set computing(RISC) microprocessor, very long instruction word (VLIW) microprocessor,processor implementing other instruction sets, or processorsimplementing a combination of instruction sets. Processor 1402 may alsobe one or more special-purpose processing devices such as an applicationspecific integrated circuit (ASIC), a field programmable gate array(FPGA), a digital signal processor (DSP), network processor, or thelike. Processor 1402 is configured to execute the processing logic 1426for performing the operations and steps discussed herein.

The computer system 1400 may further include a network interface device1408. The computer system 1400 also may include a video display unit1410 (e.g., a liquid crystal display (LCD) or a cathode ray tube (CRT)),an alphanumeric input device 1412 (e.g., a keyboard), a cursor controldevice 1414 (e.g., a mouse), and a signal generation device 1416 (e.g.,a speaker).

The secondary memory 1418 may include a machine-readable storage medium(or more specifically a computer-readable storage medium) 1431 on whichis stored one or more sets of instructions (e.g., software 1422)embodying any one or more of the methodologies or functions describedherein. The software 1422 may also reside, completely or at leastpartially, within the main memory 1404 and/or within the processingdevice 1402 during execution thereof by the computer system 1400, themain memory 1404 and the processing device 1402 also constitutingmachine-readable storage media. The software 1422 may further betransmitted or received over a network 1420 via the network interfacedevice 1408.

The machine-readable storage medium 1431 may also be used to store oneor more subsystems of a yield management system (YMS) 220, an equipmentengineering system (EES) 205 and/or a manufacturing execution system(MES) 210 (as described with reference to FIG. 2), and/or a softwarelibrary containing methods that call subsystems of a YMS, EES and/orMES. The machine-readable storage medium 1431 may further be used tostore one or more additional components of a manufacturing informationand control system (MICS), such as a decision support logic component, areal-time monitor, and/or an execution logic component. While themachine-readable storage medium 1431 is shown in an exemplary embodimentto be a single medium, the term “machine-readable storage medium” shouldbe taken to include a single medium or multiple media (e.g., acentralized or distributed database, and/or associated caches andservers) that store the one or more sets of instructions. The term“machine-readable storage medium” shall also be taken to include anymedium that is capable of storing or encoding a set of instructions forexecution by the machine and that cause the machine to perform any oneor more of the methodologies of the present invention. The term“machine-readable storage medium” shall accordingly be taken to include,but not be limited to, solid-state memories, and optical and magneticmedia.

It is to be understood that the above description is intended to beillustrative, and not restrictive. Many other embodiments will beapparent to those of skill in the art upon reading and understanding theabove description. Although the present invention has been describedwith reference to specific exemplary embodiments, it will be recognizedthat the invention is not limited to the embodiments described, but canbe practiced with modification and alteration within the spirit andscope of the appended claims. Accordingly, the specification anddrawings are to be regarded in an illustrative sense rather than arestrictive sense. The scope of the invention should, therefore, bedetermined with reference to the appended claims, along with the fullscope of equivalents to which such claims are entitled.

1. A computer implemented method comprising: receiving a yieldprediction by a scheduling and dispatch controller, wherein the yieldprediction is associated with a manufacturing tool and a product;adjusting a weighting of the manufacturing tool in a routing algorithmbased on the yield prediction; computing a cost-benefit analysis thatidentifies a cost and a benefit of manufacturing future products on themanufacturing tool; and determining whether to process a future producton the manufacturing tool based on the cost-benefit analysis.
 2. Themethod of claim 1, wherein the weighting adjusts a likelihood that thefuture products will be processed on the manufacturing tool.
 3. Themethod of claim 1, wherein the cost-benefit analysis is computed using ascoring algorithm that includes the yield prediction as a factor.
 4. Themethod of claim 3, further comprising: calculating a dispatch score forthe manufacturing machine using the scoring algorithm; calculatingadditional dispatch scores for additional manufacturing machines; and ifthe dispatch score is higher than the additional dispatch scores for thefuture product, scheduling the future product to be processed by themanufacturing machine.
 5. A computer readable medium includinginstructions that, when executed by a processing system, cause theprocessing system to perform a method comprising: receiving a yieldprediction by a scheduling and dispatch controller, wherein the yieldprediction is associated with a manufacturing tool and a product;adjusting a weighting of the manufacturing tool in a routing algorithmbased on the yield prediction; computing a cost-benefit analysis thatidentifies a cost and a benefit of manufacturing future products on themanufacturing tool; and determining whether to process a future producton the manufacturing tool based on the cost-benefit analysis.
 6. Thecomputer readable medium of claim 3, wherein the weighting adjusts alikelihood that the future products will be processed on themanufacturing tool.
 7. The computer readable medium of claim 3, whereinthe cost-benefit analysis is computed using a scoring algorithm thatincludes the yield prediction as a factor.
 8. The computer readablemedium of claim 7, the method further comprising: calculating a dispatchscore for the manufacturing machine using the scoring algorithm;calculating additional dispatch scores for additional manufacturingmachines; and if the dispatch score is higher than the additionaldispatch scores for the future product, scheduling the future product tobe processed by the manufacturing machine.
 9. An equipment engineeringsystem comprising: a yield predictor to make a yield prediction, whereinthe yield prediction is associated with a manufacturing tool and aproduct; and a scheduling and dispatch controller to receive the yieldprediction, to adjust a weighting of the manufacturing tool in a routingalgorithm based on the yield prediction, to compute a cost-benefitanalysis that identifies a cost and a benefit of manufacturing futureproducts on the manufacturing tool, and to determine whether to processa future product on the manufacturing tool based on the cost-benefitanalysis.
 10. The equipment engineering system of claim 9, wherein theweighting adjusts a likelihood that the future products will beprocessed on the manufacturing tool.
 11. The equipment engineeringsystem of claim 9, wherein the cost-benefit analysis is computed using ascoring algorithm that includes the yield prediction as a factor. 12.The equipment engineering system of claim 11, further comprising: Thescheduling and dispatch controller to calculate a dispatch score for themanufacturing machine using the scoring algorithm, to calculateadditional dispatch scores for additional manufacturing machines, and toschedule the future product to be processed by the manufacturing machineif the dispatch score is higher than the additional dispatch scores forthe future product.
 13. A method comprising: receiving a yieldprediction by a run to run controller, wherein the yield prediction isassociated with at least one of a manufacturing tool, a product or aprocess; adjusting first parameters associated with inter-process run torun control based on the yield prediction; and adjusting secondparameters associated with intra-process run to run control in responseto adjusting the first parameters.
 14. The method of claim 13, furthercomprising: adjusting third parameters associated with factory wide runto run control; adjusting the first parameters in response to adjustingthe third parameters; and adjusting the second parameters in response toadjusting the first parameters and the third parameters.
 15. The methodof claim 14, wherein the third parameters are adjusted by a factory-widerun to run control module that specifies factory-wide performancetargets, the first parameters are adjusted by an inter-process run torun control modules that specifies inter-process performance targets,and the third parameters are adjusted by an intra-process run to runcontrol module that specifies process performance targets.
 16. Themethod of claim 13, wherein adjusting the first parameters includesadjusting a target of the intra-process run to run control module, andwherein adjusting the second parameters includes modifying a processingparameter of a process recipe.
 17. A computer readable medium includinginstructions that, when executed by a processing system, cause theprocessing system to perform a method comprising: receiving a yieldprediction by a run to run controller, wherein the yield prediction isassociated with at least one of a manufacturing tool, a product or aprocess; adjusting first parameters associated with inter-process run torun control based on the yield prediction; and adjusting secondparameters associated with intra-process run to run control in responseto adjusting the first parameters.
 18. The computer readable medium ofclaim 17, the method further comprising: adjusting third parametersassociated with factory wide run to run control; adjusting the firstparameters in response to adjusting the third parameters; and adjustingthe second parameters in response to adjusting the first parameters andthe third parameters.
 19. The computer readable medium of claim 18,wherein the third parameters are adjusted by a factory-wide run to runcontrol module that specifies factory-wide performance targets, thefirst parameters are adjusted by an inter-process run to run controlmodules that specifies inter-process performance targets, and the thirdparameters are adjusted by an intra-process run to run control modulethat specifies process performance targets.
 20. The computer readablemedium of claim 17, wherein adjusting the first parameters includesadjusting a target of the intra-process run to run control module, andwherein adjusting the second parameters includes modifying a processingparameter of a process recipe.
 21. An equipment engineering systemcomprising: a yield predictor to make a yield prediction, wherein theyield prediction is associated with at least one of a manufacturingtool, a product or a process; an inter-process run to run control moduleto adjust first parameters associated with inter-process run to runcontrol based on the yield prediction; and an intra-process run to runcontrol module to adjust second parameters associated with intra-processrun to run control in response to adjustments made to the firstparameters.
 22. The equipment engineering system of claim 21, furthercomprising: a factory-wide run to run control module to adjust thirdparameters associated with factory wide run to run control; theinter-process run to run control module to adjust the first parametersin response to adjustments made to the third parameters; and theintra-process run to run control module to adjust the second parametersin response to adjustments made to the first parameters and the thirdparameters.
 23. The equipment engineering system of claim 22, whereinthe factory-wide run to run control module specifies factory-wideperformance targets, the inter-process run to run control modulespecifies inter-process performance targets, and the intra-process runto run control module specifies process performance targets.
 24. Theequipment engineering system of claim 21, wherein the adjustments madeto the first parameters include adjustments to a target of theintra-process run to run control module, and wherein adjustments made tothe second parameters include a modification to a processing parameterof a process recipe.
 25. A computerized method comprising: receiving anend-of-line yield prediction by a strategy engine; comparing theend-of-line yield prediction to a plurality of rules by the strategyengine; and instructing a component of an equipment engineering systemto perform an action included in a rule that corresponds to theend-of-line yield prediction.
 26. The method of claim 25, wherein theend-of-line yield prediction includes a yield excursion event and one ormore yield excursion conditions, the method further comprising:performing an action included in a rule that corresponds to the yieldexcursion event and the one or more yield excursion conditions.
 27. Themethod of claim 25, wherein the one or more yield excursion conditionsinclude at least one of a contributor to the end-of-line yield excursionor a confidence of the end-of-line yield prediction.